By Zhenghao Gan,Waisum Wong,Juin J. Liou
ISBN-10: 007175427X
ISBN-13: 9780071754279
Proven strategies for making sure semiconductor machine reliability
Co-written by way of specialists within the box, Semiconductor procedure Reliability in Practice includes exact descriptions and analyses of reliability and qualification for semiconductor gadget production and discusses the underlying physics and conception. The booklet covers preliminary specification definition, try out constitution layout, research of attempt constitution information, and ultimate qualification of the method. Real-world examples of attempt constitution designs to qualify front-end-of-line units and back-end-of-line interconnects are supplied during this functional, entire guide.
Coverage includes:
- Basic machine physics
- Process move for MOS manufacturing
- Measurements worthwhile for gadget reliability characterization
- Hot provider injection
- Gate-oxide integrity (GOI) and time-dependent dielectric breakdown (TDDB)
- Negative bias temperature instability
- Plasma-induced damage
- Electrostatic discharge security of built-in circuits
- Electromigration
- Stress migration
- Intermetal dielectric breakdown
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Semiconductor Process Reliability in Practice by Zhenghao Gan,Waisum Wong,Juin J. Liou
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